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인증된 전문가에게 직접 연결
인증된 전문가에게 직접 연결
H2O、 O2: ≤lppm
The leak rate: ≤0.05Vol% h (monthly leakage of oxygen <1L)
Foreline vacuum degree: 0 ~ -0.1MPa (2.5-stage vacuum table)
Case vacuum degree: 0 ~ -0.1MPa (2.5-stage vacuum table)
Transfer chamber: can withstand vacuum degree ≥100Pa
Working gas: nitrogen, argon, helium (purity 99.5%)