Trek 640 정전기 척 최적화

Output Voltage Range: 0 to ± 2 kV 
Output Current Range (mA): 0 to ± 5 
Voltage Monitor Scale Factor: 1 / 200 V 
Voltage Monitor DC Accuracy (%): 0.1 
Offset Voltage / Zero Offset Voltage: < 5 mV 
Current Monitor Scale Factor: 1 V/mA 
Current Monitor DC Accuracy: 0.01 
Output Noise (mV): < 10 rms

Datasheet