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인증된 전문가에게 직접 연결
인증된 전문가에게 직접 연결
Plasma Mode: RIE/DP selectable
Electrode structure: Parallel flat stage plate
Vacuum gauge: Capacitance manometer
High frequency output: Max 300W
Oscillation Frequency: 13.56MHz Quartz oscillator
Output setting method: Manual setting on LCD touch panel
Matching method: Auto tuning
Chamber size: W500×D300×H200mm
Stage size: W400×D200mm
Chamber material: Aluminum
Reaction gas: 2 systems (Argon, Oxygen)
Purge gas: Nitrogen or dry air
Reaction gas flow control: Mass flow controller
Rotary vacuum pump: Approx. 500L/min. (Provided)
External dimensions（W×D×H mm）: W700×D700×H1,285mm
Weight: Approx. 180kg
Power Source: AC220V~AC 415V 3-phase with step-down transformer
