Yamato V1000XS Plasma Cleaner (1000W ~ 2,000W)

Plasma Mode: DP/RIE

Oscillation Frequency: 13.56MHz

RF Power: 1,000W  ~ 2,000W

Stage Dimensions: 400W×375D mm, Parallel flat stage plate (Multi)

Reaction Gas: Mass flow control, 2 system + 1 for purge gas

Vacuum Pump: Included, Approx. 1,000L~1500L/min exhaust volume

Safety Device: Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device

Internal dimensions（W×D×H mm）: 600×554×440mm

External dimensions（W×D×H mm）: 900×1000×2040mm

Power Source: AC220V~AC 415V 3-phase with step-down transformer

Datasheet