Advanced Energy Luxtron m924 光纤温度传感器 (-100~330°C, 4 Channels)

- Channels: 4 Channels
- Temperature Range: -100 ~ 330°C (probe dependent)
- Measurement Resolution: 0.01°C
- Measurement Rate: Up to 50 Hz per channel
- Accuracy: ±0.05°C (probe dependent)
Environmental
- Operating Temperature: -40 ~ 85°C
- Size (H x W x L): 23.7  x 100.6  x 134.4 mm (main board)
- Housing: Metal enclosure for electromagnetic shielding (optional accessory)
Communication
- Analog Output: 0 ~ 10 V or 4 ~ 20 mA
- Serial Output: RS232 and RS485
- Protocol: ASCII and Modbus (RS485)
Electrical:
- Input Power: +5 ~ 24 VDC nominal at 100 mA

Datasheet

Accessories

Typical Applications
- Plasma etch electrostatic chuck monitoring
- Plasma shower monitor inside the chamber
- Temperature monitoring outside the chamber
- Wafer fab equipment temperature monitoring
- Semiconductor and FPD processing using RF and plasma