Advanced Energy Paramount HF RF Plasma Generator (6.0kW, 13.56MHz)

- RF Power: 1.5kW, 3.0kW, 6.0kW
- Frequency:
13.56 MHz
Frequency tuning ±5%
- Typical Tune Time: < 10 ms
- Power Accuracy into 50 Ω: ±1 W or ±1% of set point, whichever is greater
Into 3:1 VSWR: ±1 W or ±2% of set point, whichever is greater
- Pulsing Frequency Range: 10 Hz ~ 100 kHz
- Available Serial Interface: RS-232, Ethernet, DeviceNet®, Profibus, EtherCAT®

Datasheet