API XD5 LP CNC Machine Measurement System (0 – 45 m, 0.2 μm/m)

Linear Measurement

Measuring Range: 0 – 45 m (Optional: 80 m)

Accuracy: 0.2 μm/m

Straightness Measurement

Measuring Range: ± 0.3 mm*

Accuracy: ± (0.5 μm + 0.1 μm/m) or 1% of max measured error

Angularity Measurement

Measuring Range: ± 400 arcsec

Pitch & Yaw Accuracy: ± (0.5 arcsec + 0.05 arcsec/m)

Roll Accuracy (Horizontal Axes Only): Not supported

Parallelism Measurement

Accuracy: ± (1.0 arcsec + 0.2 arcsec/m)

Squareness Measurement

Accuracy: ± (1.0 arcsec + 0.2 arcsec/m)

Datasheet