Brooks Instrument BVT100 真空传感器 (7.5 × 10⁻⁷ ~ 1000 Torr, DN16KF, 15 pin D Sub)

Fitting: DN16KF

Electrical Connection: 15pin D Sub  

Performance

Measurement Range: 7.5 × 10⁻⁷ to 1000 Torr

Sensor Measurement Ranges:

MEMS Pirani thermal conductivity:7.5 × 10⁻⁷ to 1.125 Torr

Blended MEMS Pirani/Piezo: 1.125 to 1.5 Torr

MEMS Piezo resistive diaphragm: 1.5 to 1000 Torr

Accuracy:

7.5 × 10⁻⁶ to 7.49 × 10⁻⁵: ±25% of reading

7.5 × 10⁻⁵ to 7.49 Torr: ±5% of reading

7.5 to 74.9 Torr: ±1% of reading

75 to 599 Torr: ±0.5% of reading

600 to 824 Torr: ±0.25% of reading

825 to 1000 Torr: ±0.5% of reading

Hysteresis:

7.5⁻⁴ to 7.5 Torr: 1%

7.5 to 900 Torr: 0.1%

Vacuum Temperature Sensor:

Range: -20 to +85°C

Accuracy: ±1.5°C

Response Time: <20 ms

Temperature Compensation: 10 to 50°C

Materials Exposed to Vacuum: 304 stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO₂,Si₃N₄,Gold, Viton, low out-gassing epoxy resin, solder, RO4305

Flange/Fitting: SS 1.4307/AISI 304L

Electrical

 Analog Output Signal (absolute pressure): 0.5 -9.5 Vdc (1V per decade) standard, other selectable/user programmable options¹

Analog Output Resolution: 16 bit (150 µV)

Analog Output Update Rate: 124 Hz

Digital Communication: RS232 / RS485

Solid State Relays

Number of Relays: Up to 3

Set Point Range (absolute): 3.75×10⁻⁶ to 1000 Torr

Set Point Range (atm. relative): -770 to +375 Torr

Contact Rating: 50 V, 100 mArms / mADC

Approvals:

UL Recognized: File E76270

CSA Certified: Certificate 1175739

EN/IEC 60950-1 Certified

For more details, see datasheet.

Datasheet

User Manual