Brooks Instrument BVT200 VersaTorr 皮拉尼传感器 (7.5E-7 ~ 1000 Torr, DN25KF, 9 pin D Sub)

Fitting: DN25KF

Electrical Connection: 9pin D Sub

Measuring range: 7.5E-7 to 1000 Torr

Measuring principle 7.5E-7 to 7.5E-4 mbar: MEMS Pirani thermal conductivity

Measuring principle 7.5E-4 to 3.75E-3 mbar: Blended MEMS Pirani / piezo reading

Measuring principle 3.75E-3 to 3 mbar: Capacitance diaphragm gauge (CDG)

Measuring principle 3 to 4.5 mbar: Blended MEMS Piezo / CDG

Measuring principle 4.5 to 1000 mbar: MEMS piezo resistive diaphragm

Accuracy 7.5E-6 to 7.5E-5 mbar: 25% of reading

Accuracy 7.5E-5 to 7.5E-3 mbar: 5% of reading

Accuracy 7.5E-3 to 599 mbar: 0.5% of reading

Accuracy 600 to 824.9 mbar: 0.25% of reading

Accuracy 825 to 1000 mbar: 0.5% reading

Barometric measurement range: 225 to 900 Torr

Vacuum temperature sensor range: -20 to + 85°C

Vacuum temperature sensor accuracy: +/- 1.5 °C

Analog output resolution: 16 bit (150 µV)

Analog output update rate: 124 Hz

Response time: <20 ms

Temperature compensation: +10 to +50 °C

Solid state relay set point range (absolute): 3.75E-6 to 1000 Torr

Solid state relay set point range (atm. relative): -770 to +375 Torr

Solid state relay contact rating: 50 V, 100 mArms / mADC

Solid state relay contact endurance: Unlimited (no mechanical wear)

Solid state relay approvals: UL Recognized File E76270

CSA Certified: Certificate 1175739

EN/IEC 60950-1 Certified 

For more details, see datasheet.

Datasheet