Brooks Instrument GF040-VX-D5 气体质量流量控制器 (3 sccm ~ 50 slm, 1/4" VCR, DeviceNet)

Meter Series Fitting: 9/16” - 18 UNF

Communications/Connector：DeviceNet / Analog (Output 0-5 V); 5-Pin mico signal and power / 3-Pin analog signal

Performance: 

Full-Scale Flow Range (N2Eq.): 3 sccm to 50 slm

Flow Accuracy: ±1% S.P. 35-100%, ±0.35% F.S. 2-35%

Repeatibility & Reproducibility: <±0.2% S.P.

Linearity: ±0.5% F.S. (included in accuracy)

Response Time (Settling Time):

Normally Closed Valve <1 sec (within 2% for steps 0-10 through 0-100%)

Normally Open Valve <3 sec (within 2% for steps 0-10 through 0-100%)

Control Range: 2 - 100%

MultiFlo™: Standard

Number of Bins: 10 bins

Valve Shut Down: <1% of F.S.

Zero Stability: <+0.5% F.S. per year

Pressure Coefficient: 0.03% per psi (0-50psi N2)

Attitude Sensitivity: <0.25% span change @ 90° after rezeroing (N2@ 50 psi)

Auto Shut-off: The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale

Ratings

Operating Temperature Range: 5-50°C (41-122°F)

Maximum Operating Pressure: 150 psig (10 bar)

Design Proof Pressure: 4000 psig (275 bar)

Differential Pressure Range:

3-860 sccm = 7-45 psid

861-7200 sccm = 15-45 psid

7201-50000 sccm = 25-45 psid

Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure

Leak Integrity (External): 1x10^-9 atm. cc/sec He

For more details, see datasheet.

Datasheet

User Manual