Brooks Instrument PC125XD 金属密封压力控制器 (2600-10000 sccm N₂Eq, ±1% of reading)

Performance

Embedded Thermal Flow Sensor: Ability to Monitor Flow

Full Scale Range:  2600-10000 sccm N₂Eq

Pressure Reading

Accuracy: ±1% of reading

Zero Temperature Coefficient: ±0.02% of F.S./ºC

Span Temperature Coefficient: ±0.04% of reading/ºC

Pressure Control

Measurement Range: 2-100% F.S.

Accuracy: <10% F.S. ±0.2% F.S., 10-100% F.S. ±1% F.S.

Response Time: <1 sec typ. (excluding system time constant)

Ratings

Measurement Range: 2-100% of F.S.

Accuracy: >35% ±1% of reading 2-35% ±0.35% F.S.

Repeatability: ±0.2% of F.S.

Zero Temp. Coefficient: <0.05% of F.S./ºC

Span Temp. Coefficient: <0.08% of reading/ºC

Zero Stability: <0.5% per year

Valve Leak-by: <1% of F.S.

Ratings

Operating Temperature Range: 10 to 50ºC

Transducer Pressure Range: 1000 Torr

Transducer Over Pressure Limit: 2000 Torr

Differential Pressure: 45 psid max

Leak Integrity (external): 1 x 10⁻¹⁰ atm. cc/sec He

Electrical

Electical Connection: 5-pin M12 Connector

Digital Communications: DeviceNet (model specific)

Diagnostic/Service Port: RS485 via 2.5 mm jack

Power Supply/Consumption: DeviceNet: 545mA max. @ +11-25 Vdc,250 mA max. @ 24 Vdc

Datasheet

User Manual