Chotest SuperView W1 纳米3D光学表面轮廓仪 (≤10mm; 0.1nm)

Standard field of view: (0.98*0.98)mm

Max field of view: (6x6)mm

Reflectivity of test object: 0.5 % ~100 %

Repeatability of Roughness RMS: 0.005nm

Scanning range: ≤10mm

Resolution: 0.1nm

Accuracy of stage measurement: 0.3 %

Repeatability of stage measurement: 0.08% 1σ

Datasheet