Fcon CUBEGM2 气体混合器 (10SCCM～20SLM, AC85-260V)

Size: W315×D298×H250(mm) ※Except protrusion

Input power: AC85-260V

Current consumption: MAX 1A ※In the case of 4 mass flow controllers equipped with

Flow rate control range: 1 LINE : F.S.10SCCM～20SLM (However, the mixed gas flow rate must be less than 50 SLM)

Flow rate control: MFC : C1000 Series or FCST1000L Series

Flow rate output signals: 0-5VDC

INLET, OUTLET Valve: Ball Valve

Leak Integrity: ≦5×10-7Pa･m3/sec He

Pressure resistance: 1MPa

Wetted surface material: SUS316, PTFE, Fluoro-Rubber (FCST1000L Series : Magnetic stainless steel, Fluoro-Rubber or Chloroprene rubber)

Standard fitting: 1/4in.SWL (equivalent)

Operating environment: 5-50℃, 30-80％RH (Scope of accuracy guarantee : 15-35℃)

Accessory: AC cable(2m), User's manual, Written guarantee

Datasheet