HIROX SH-5000 台式扫描显微镜 (100.000x)

Resolution: 5 nm

Magnification: Max. 100,000x

Voltage: 1kv ~ 30kv (1/5/10/15/20/30)

Detection: SE (Secondary Electron)

                 * BSE (Option)

Electron Gun: Tungsten Filament (cartridge)

Sample stage: X, Y : 40mm, R: 360°

                        Z: 0~35mm, T: 0~45°

                        - 5-axis (Manual)

Sample (Diameter/Height): 80mm/35mm

Vacuum System: High Vacuum

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