Flow (L/min): 200
Working vacuum (MPa): 0.08 ~ 0.099
Working Pressure (MPa): ≤0.3
Breakdown Voltage (KV): ≥75
Water Content (PPM): ≤3
Gas Content (%): ≤0.01
Impurity Size (μ): ≤5
Temperature Range (°C): 20 ~ 80
Power: Three Phase 50HZ380V (as per the customer's requirements)
Working Noise (dB(A)): 80
Heating Power (kW): 75
Total Power (kW): 86.5
Inlet/Outlet (mm): φ50
Weight (kg): 1800
Overall (L x W x H): 1600 x 1100 x 1800
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