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Response time: 100 ms
Lowest reading: 0.01 % FS
Lowest suggested reading: 0.05 % FS
Temperature
Operation (ambient): +10 … +40 °C
Storage: –10 … +50 °C
Supply voltage: +14 ... +30 V (dc) or ±15 V (±5%)
Power consumption
During Heat up: ≤15 W (1000 ... 100 Torrr & 10 ... 1 Torr); ≤12 W (0.1 Torr)
At operating temperature: ≤10 W (1000 ... 100 Torrr & 10 ... 1 Torr); ≤8 W (0.1 Torr)
Output signal (analog): 0 ... +10 V (dc)
Degree of protection: IP 40
Standards
CE conformity: EN 61000-6-2, EN 61000-6-3, EN 61010-1 and RoHS
ETL certification: UL 61010-1, CSA 22.2 No. 61010-1
SEMI compliance: SEMI S2
Electrical connection D-sub, 15-pin, male; 2 × LEMO Coax; Ethernet FCC
Setpoint
Number of setpoints: 2 (SP1, SP2)
Relay contact: ≤30 V (dc) / ≤0.5 A (dc)
Hysteresis: 1 % FS
Diagnostic port
Protocol: Web pages, REST services, RS232-ASCII
Materials exposed to vacuum: ceramics (Al2O3), stainless steel (AISI 316L)
Internal volume: ≤4.6 cm3
Weight: 1760 … 1803 g
