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Smallest detectable leak rate: 5x10-7mbar I/ s (helium-equivalent leak rate)
Leak rate unit: mbar·l/ s, atm·cc/ s, Pa·m³ / s
Detection sensor: Quadrupol mass spectrometer (2 cathodes)
Interfaces: PROFIBUS, PROFINET, DeviceNet, Ethernet / IP, serial interfaces (RS232), digital I/Os
Dimensions (W x H x D): 482.6 mm x 233.4 mm x 497.5 mm (19in x 9.2in x 19.6in)
Operating languages: German, English, Spanish, Korean, Chinese, Japanese
