INFICON MAG050 冷阴极无源测量头 (DN 40 CF-F)

Measurement system: cold cathode ionization (inverted magnetron principle)

Measurement range (N2): 2 × 10^-9… 5 × 10^-3 mbar

Accuracy (N2, typical): 30% of reading

Repeatability (N2, typical): 5% of reading

Mounting orientation: any

Operation Temperature

with standard cable: +5 … +80 °C

with high temperature cable: +5 … +150 °C

Bakeout: 150°C

Storage: -40 … +80 °C

Relative humidity: max. 80 % at temperature up to +30°C, decreasing to 50 % at +45°C

Standard operating characteristics with VGC094/VGC083

Voltage (within measuring chamber): ≤3.3 kV

Current (within measuring chamber): ≤700 μA

Electrical connection

Type: coaxial

Connector: Bayonet, SHV

Use: indoors only, altitudes up to 2000 m

Maximum cable length: ≤100 m (≤40 m, if the lower limit of the measurement range is used)

Overpressure: ≤9 bar (limited inert gases)

Protection category: IP40

Materials exposed to vacuum

Vacuum chamber: Stainless steel (EN 1.4306, 1.4104, 1.4306)

Feedthrough: Al2O3

Internal seal: FPM

Anode: Mo

Ignition aid: Stainless steel (EN 1.4310)

Internal volume: ~20 cm3

Weight: 850 g

Datasheet

Manual