INFICON Modul1000 氦检漏仪

Minimum detectable leak rate: < 5 x 10-12 mbar l/s

Maximum inlet pressure: 0.4 mbar

Operational mode: wide range without crossover(12 decades)

Helium pumping speed at inlet: 2.5 l/s

Ion source: 2 longlife Iridium filaments, Yttrium-oxide coated

Start-up time: < 3 minutes

Inlet port / Fore-vacuum port: DN 25 KF

Power supply: 85 - 265 V, 50/60 Hz

Control inputs: 8 x PLC compatible (max. 35 V)

Status / Valve control / Trigger outputs: 9 / 11 / 3 x relay contacts (max. 60 V AC / 25 V DC / 1 A)

Chart recorder output lin/log: 2 x 0-10 V, programmable

Recommended fore-vacuum pump: 2.5 - 16 m3/h, wet or dry

Dimensions (width x depth x height): 535 x 350 x 339 mm (21 x 13.8 x 13.4 in)

Weight: 30 kg (66 lbs)

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Manual