INFICON UL1000 Fab 氦检漏仪

Smallest detectable leak rate (vacuum mode): <5 x 10^-12 mbar·l/s

Smallest detectable leak rate (sniffer mode): <5 x 10^-8 mbar·l/s

Max. Inlet pressure: 15 mbar

Pumping speed during evacuation: 25 m³/h

He pumping speed at the inlet (ULTRA mode): 2.5 l/s

Detectable masses (ULTRATEST Sensor Technology): 2, 3, 4 (H2, 3He, He)

Supply voltages: 100-120 V; 220-240 V

Weight: 110 kg; 242 lb.

Dimensions, incl. handle (L x W x H): 1068 x 525 x 850 mm (42 x 21 x 33)

Brochure

Manual