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X axis
Measuring range: 200mm
Resolution: 0.5μm
Accuracy: +/-(1+L/80)μm, L(mm)
Z axis
Measuring range: 50mm
Resolution: 0.2μm
Accuracy: +/-(1+H/30)μm, H(mm)
Traverse speed: 0~10mm
Measuring speed: 0.2, 0.5, 1, 2mm/s
Radius of probe tip: 20μm
Measuring Unit: mm/inch
Traverse direction: backword
Measuring force: 30mN
Traceable angle: 75 degree (upward), 85 degree (downward)
Travel of Z axis: 300mm
Dimension(LxWxH): 110x570x720mm
Power supply: 110~240V/50~60Hz
Weigth: 42Kg
Included: main unit (1pc), standard probe (ISQ-PGS-T01) (1pc), software, USB cable(1pc)
Optional: calibration block, 4 axis stage, vise, probe
