INSIZE SPM-1000 表面轮廓测量机 (140mm; 0.2μm)

Specifications

X axis measuring range: 140mm

X axis resolution: 0.2μm

X axis straightness: 0.8μm/100mm

X axis traverse speed: 0.1-10mm/s

Z axis measuring range: ±20mm

Z axis resolution: 0.05μm

Z axis traverse speed: 0.5-10mm/s

Linear accuracy: ±(1.5+|0.2H|)μm, H is measuring height in mm

Angular measuring accuracy: ±2'

Arc measuring accuracy: ±(2+R/8)μm, R is 2-10mm standard ball

Radius of probe tip: 25μm

Traverse direction: backword

Measuring force: 6.86-9.8mN

Measuring unit: mm/inch

Traceable angle: 72° (upward), 87° (downward)

Drive mode: motor

Travel of Z axis: 430mm

Dimension(LxWxH): 1200x700x1780mm

Power supply: 220±25%V, 50Hz

Weight: 320kg

Standard delivery

Main unit: 1 pc

Standard probe and arm: 1 pc of each

Standard block: 2 pcs

Standard ball: 2 pcs

Standard shaft: 1 pc

Stage: 1 pc

Vise: 1 pc

Measuring arm: 1 pc

Computer: 1 pc

Measurement software: 1 pc

Printer: 1 pc

Installation tools: 1 set

Optional accessory

Probe and measuring arm

Datasheet