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Travel range XY: 400×350mm
Repeat Positioning Accuracy: 2µm
Measuring range of Z-axis: 24mm
Width of X-axis: 96mm
Accuracy of Z-axis: ±0.02mm
Repeatability of Z-axis: ±0.5µm
Scanning speed: 2500~10000Hz
Power supply: 220V, 50Hz
Weight: 200kg
Dimension (L×W×H): 750×760×1400mm