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Surface roughness measurement
- Measuring range:
X axis: 100 mm
Z1 axis: 800 µm, 80 µm, 8 µm
- Straightness (when the X axis is horizontal): (0.05+0.001L) µm L = Measurement Length (mm)
Contour measurement
- Measuring range:
X axis: 100 mm
Z1 axis: 60 mm (±30 mm in horizontal situation)
- Straightness (when the X axis is horizontal): 0.8 µm/100 mm
- Accuracy (20 °C):
X axis: (0.8+0.01L) µm L = Measurement Length (mm)
Z1 axis (detector unit): ±(1.2+|2H|/100) µm H = Measurement height from the horizontal position (mm)
Common specifications
- X-axis inclination angle: ±45°
- Z2-axis (column) travel range: 700mm
- Base size (W×D): 1000x450
- Base material: Granite
