MITUTOYO QV ACCEL 1010 光学测量系统 (1000x1000x150 mm)

Resolution: 0.1 µm

Factory option: Tracking Auto Focus (TAF)

High-sensitivity CCD camera: B&W CCD camera

Contour illumination: White LED

Coaxial illumination: White LED

4-quadrant PRL (1) illumination: White LED

Range (X, Y, Z-axis) with Vision Head: 1000x1000x150 mm

Magnification change system: Programmable Power Turret (PPT) 1X ; 2X ; 6X

Max. drive speed X, Y-axis: 400 mm/s

Accuracy E1: (1.5+0.3L/100) μm

Stage glass size: 1186x1186mm

Datasheet