MKS 356 Micro-Ion® Plus 真空压力传感器 (DeviceNet; NW25 ISO-KF)

Range: 1 x 10^-9 - 50 Torr

Measurement Range: 1 x 10^-9 Torr to atmosphere (for Air and N2)

Repeatability: <5% of Reading from 1 x 10^-8 - 50 Torr

Accuracy: <15% of reading from 1 x 10^-8 - 50 Torr

Filament: Yttria-coated Iridium

Fitting Type: ISO-KF

Flange Size: NW25

Interface: DeviceNet

Operating Temperature: 10 - 40°C ambient, non-condensing

Bake Out Temperature: 150°C (with electronics removed)

Storage Temperature: -40 - 70°C

Relays: 2 single-pole, double-throw relays (SPDT)

Relay Contact Rating: 1 Amp @ 30 VDC resistive, non-inductive

Power Requirements: 24 VDC ±15%, 26 Watts max.

Exposed Materials: 304 stainless steel, tantalum, tungsten, nickel, nickel iron alloy, borosilicate glass

Case Material: Aluminum extrusion

Internal Volume: 10.8 cm3 (0.67 in3) to the port screen

Units: Torr

X-ray Limit: <3 x 10^-10 Torr

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