MKS 972B 双磁冷阴极真空传感器 (Display; NW25 ISO-KF; RS232; 3 Relays)

Absolute Measurement Range: 1.0 x 10-8 to 760 Torr

Digital Communication: RS232

Type: Vacuum Transducer

Sensor: Cold Cathode and MicroPirani™ (MEMS Thermal Conductivity)

Display: Touch-screen

Seal Material: Viton

Electrical Connector: 15-pin, High Density, D-sub male

Interface: RS232/analog

Relays: 3

Fitting Type: NW25 ISO-KF

Installation Orientation: Any

Set Point Range: 1 x 10-8 Torr to Atmosphere Absolute

Calibration Gas: Nitrogen

Operating Temperature: 0 - 40°C (32 - 104°F)

Maximum Bakeout Temperature: 85°C (185°F)

Analog Output: 0.5 VDC per Decade

Relay Contact Rating: 1 A @ 30VAC/DC, resistive

Power Requirements: 9 - 30 VDC, 2 Watts

Overpressure Limit: 1500 Torr

Internal Volume: 21 cm3

Exposed Materials: 304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton, epoxy resin, ceramic

Electronic Casing and Flange: 304 stainless steel

Compliance: CE

Literature

Manual

Drawing