MKS CMA10B-MFM 紧凑、快速响应的质量流量控制器 (15 - 14000 sccm)

Full Scale Flow Range: 15-14,000 sccm (N2)

Maximum Inlet Pressure: 80 psig

Proof Pressure: 232 psi/16 bar

Burst Pressure: 1000 psi/70 bar

Measurement Range: 0.1-100% of Full Scale

Typical Accuracy: ±0.8% of Reading

Repeatability: ±0.2% of Reading

Resolution: 0.1% of Full Scale

Zero Temperature Coefficient: ≤0.005% of Full Scale/°C

Span Temperature Coefficient: ≤0.06% of Reading/°C

Pressure Coefficient: <0.025% of Reading/psi

Warm-up Time: ≤1 min

Operating Temperature: 10-50°C (32-122°F)

Storage Humidity: 0-95% relative humidity, non-condensing

Storage Temperature: 0-60°C (32-140°F)

Power Requirements: 24 VDC @ (±10%), <2 watts

Flow Input Output Signal: 0-5 VDC (0-10 VDC, optional)

Analog I/O Connector: 9-pin Type D

Weight: 0.45 lbs (204 grams) (VCR)

Compliance: CE (Electrical Analog I/O)

For specific range please check the attachment below!

Literature

Manual

Drawing