MKS GHW-50 高可靠性射频等离子体发生器 (5kW; 13.56MHz)

Frequency: 13.56MHz ±0.005%

Dynamic Power Range: 10 - 5000 W

Power Output: 5.0 kW

Load Impedance Range: Unlimited

RF Stability/Spurious Output: Unconditionally stable for any load within operational limits < -45dBc

Harmonic Output & Distortion: < -40dBc

Regulation Tolerance: >500 W: ±1.5% SP, <500 W: ±10.0 W

Input AC Power: 200/208 VAC, 3/PE~ (3W+G) 30 A/PHASE, 380/400 VAC, 3/PE~ (3W+G) 15 A/PHASE

RF Connector: Type N

Interface: Standard: RS-232 Subminiature Type-D 9-pin digital, optional custom interface cards available.

Rack Mountins: EIA (Standard) 19-inch adapters supplied

Cooling System: Water flow at 2.0 Gal./Min. (7.6 LPM) minimum at 5 - 35°C. Connections provided to accept 3/8 inch male (NPT) pipe thread

Dimensions: Rack Mount: 8.72 x 19 x 22.1 inches (221 x 483 x 560 mm) (HxWxD)

Weight: 91 lbs. (41.3 kg)

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