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Type: High Power Plasma Source
Plasma Tube Material: Quartz
Operating Frequency: 2.44-2.47 GHz
Maximum Power: 6 kW
Operating Pressure: 1-10 Torr
Total Gas Flow: 1-10 slm
Minimum Water Flow: 0.50 gpm at min 37 psid
Waveguide: WR284
Waveguide Flange Connection: CPR284F with bolts
Water Inlet Connection: 3/8 inch Swagelok®
Water Outlet Connection: 3/8 inch Swagelok®
Electrical Requirements for UV Lamp: 24 VDC, 1.0 Amp
Gas Line Connection: 4 VCR® male
Dimensions: 18.52 x 4.5 x 6.32 inches
Weight: 18 lbs
Compliance: CE
