MKS KEINOS KEINOS™ 射频等离子发生器 (5, 11, or 13kW; 2MHz)

Frequency: 1.985 MHz

Frequency Tuning Range: ±10%

Power Output: 5kW, 11kW, 13kW

Accuracy: ±5W up to 500W; ±1% from 501W to max power

Load Impedance Range: Unlimited

Pulse Frequency: Up to 50KHz

Pulse Rise Time: <5 µsec

Pulse Fall Time: <5 µsec

Minimum Pulse Width: 10 µsec

Pulse Energy Repeatability: <3%

Input AC Power200/208: VAC ±10%, 3 Phase, 50/60 Hz

Rated Current: 5 kW: 25 amps max

                        11 & 13 kW: 55 amps max

RF Connector: SQS standard (QC output)

Interface: Ethernet, RS232

Dimensions: 5 kW: 5.25 x 17.5 x 24.5 inches

                    11 kW & 13 kW: 8.30 x 17.8 x 25.5 inches (H x W x D)

Compliance: NRTL, CE EMC (EN60204, 61010), SEMI S2, S7, S14, SEMI F47, UL61010

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