MKS RPS-CH24P1-P24C 用于高流量应用的远程等离子体源 (24 kW)

Type: RPS-CH24P1 Remote Plasma Source

Power Output: 24 kW

RF Frequency: 400 kHz

Accuracy: ±1% to power set point

Gas Supply During Ignition: Ar

NF3 Operation Reactant Output: 1-25 slm 20T

Compatible Species: NF3, O2, N2, Ar

THD: <15%

Inlet Gas Connection: KF40

Outlet Gas Connection: KF50

Cooling Water Required: Remote Head: 3 gpm (11.36 Lpm)

                                        DC Power Supply: 2 gpm (7.57 Lpm)

Control Interface: Analog: DB25

                            Digital: EtherCAT

Power Requirements: 208 V, 3 phase 50/60 Hz, 75 Amps RMS max phase

Dimensions:

- Remote Head: 22.02 x 10.76 x 11.1 in. (55.93 x 27.33 x 28.19 cm)

- Power Supply: 21.24 x 19.00 x 7.0 in. (53.95 x 48.26 x 17.78 cm)

Weight:

- Remote Head: 100 lbs. (45.36 kg)

- Power Supply: 62 lbs. (28.12 kg)

Compliance: SEMI F47

Literature

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