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Type: RPS-CH24P1 Remote Plasma Source
Power Output: 24 kW
RF Frequency: 400 kHz
Accuracy: ±1% to power set point
Gas Supply During Ignition: Ar
NF3 Operation Reactant Output: 1-25 slm 20T
Compatible Species: NF3, O2, N2, Ar
THD: <15%
Inlet Gas Connection: KF40
Outlet Gas Connection: KF50
Cooling Water Required: Remote Head: 3 gpm (11.36 Lpm)
DC Power Supply: 2 gpm (7.57 Lpm)
Control Interface: Analog: DB25
Digital: EtherCAT
Power Requirements: 208 V, 3 phase 50/60 Hz, 75 Amps RMS max phase
Dimensions:
- Remote Head: 22.02 x 10.76 x 11.1 in. (55.93 x 27.33 x 28.19 cm)
- Power Supply: 21.24 x 19.00 x 7.0 in. (53.95 x 48.26 x 17.78 cm)
Weight:
- Remote Head: 100 lbs. (45.36 kg)
- Power Supply: 62 lbs. (28.12 kg)
Compliance: SEMI F47
