Nordson AP-1000 等离子体处理系统 (127 liters)

Enclosure Dimensions

W x D x H – Footprint: 680W x 1127D x 1890H (26.77W x 62.3D x 74.4H in.)

Net Weight: 485 kg (1069 lbs.)

Equipment Clearance: Right, Left – 153 mm (6 in.), Front – 680 mm (27 in.), Back – 483 mm (19 in.) min.

Maximum Volume: 127 liters (7774 in³)

Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power

Number of Electrode Positions: 14

Electrode Pitch: 

25.4 mm (1 in.) for 600 W

50.8 mm (2 in.) for 1000 W

Electrodes 

Powered Working Area 349W x 425D mm (13.74W x 16.73D in.)

Ground/Perforated Working Area 384W x 425D mm (15.12W x 16.73D in.)

Floating Working Area 349W x 425D mm (13.74W x 16.73D in.)

RF 

Power Standard Wattage: 600 W

Frequency: 13.56 MHz

Gas Control 

Available Flow Volumes: 100, 250, 500, or 1000 sccm

Maximum Number of MFCs: 3

Control System and Interface

Software Control: EPC control with touchscreen interface

Remote Interface: PlasmaLINK, ProcessLINK, SECS/GEM

Vacuum Pump Standard Wet Pump: 53 cfm with Oxygen Oil Mist Eliminator

Optional Purged Dry Pump: 63 cfm

N2 Purged Pump Flow: 14 slm

Brochure