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Enclosure Dimensions
W x D x H – Footprint: 680W x 1127D x 1890H (26.77W x 62.3D x 74.4H in.)
Net Weight: 485 kg (1069 lbs.)
Equipment Clearance: Right, Left – 153 mm (6 in.), Front – 680 mm (27 in.), Back – 483 mm (19 in.) min.
Maximum Volume: 127 liters (7774 in³)
Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power
Number of Electrode Positions: 14
Electrode Pitch:
25.4 mm (1 in.) for 600 W
50.8 mm (2 in.) for 1000 W
Electrodes
Powered Working Area 349W x 425D mm (13.74W x 16.73D in.)
Ground/Perforated Working Area 384W x 425D mm (15.12W x 16.73D in.)
Floating Working Area 349W x 425D mm (13.74W x 16.73D in.)
RF
Power Standard Wattage: 600 W
Frequency: 13.56 MHz
Gas Control
Available Flow Volumes: 100, 250, 500, or 1000 sccm
Maximum Number of MFCs: 3
Control System and Interface
Software Control: EPC control with touchscreen interface
Remote Interface: PlasmaLINK, ProcessLINK, SECS/GEM
Vacuum Pump Standard Wet Pump: 53 cfm with Oxygen Oil Mist Eliminator
Optional Purged Dry Pump: 63 cfm
N2 Purged Pump Flow: 14 slm
