Nordson AP-600 等离子体处理系统 (50.4 liters)

Enclosure Dimensions

W x D x H – Footprint: 569W x 869D x 704H mm (22W x 34D x 28H in.)

Net Weight: 221 kg (487 lbs)

Equipment Clearance: Right, Left, Front – 569 mm (22 in.), Back – 254 mm (10 in.)

Chamber 

Maximum Volume: 50.4 liters (3076 in³)

Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power

Number of Electrode Positions: 7

Electrode Pitch: 25.4 mm (1 in.)

Electrodes 

Powered Working Area: 330W x 330D mm (13W x 13D in.)

Ground/Perforated Working Area: 368W x 330D mm (14.5W x 13D in.)

Floating Working Area: 330W x 330D mm (13W x 13D in.)

RF 

Power Standard Wattage: 600 W

Frequency: 13.56 MHz

Gas Control 

Available Flow Volumes: 10, 25, 50, 100, 250 or 500 sccm

Maximum Number of MFCs: 3

Control System and Interface

Software Control: EPC control with touchscreen interface

Remote Interface: PlasmaLINK, ProcessLINK

Vacuum Pump Standard Wet Pump: 19.5 cfm with Oxygen Oil Mist Eliminator

Optional Purged Dry Pump: 22 cfm

N2 Purged Pump Flow: 2 slm

Brochure