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Enclosure Dimensions
W x D x H – Footprint: 569W x 869D x 704H mm (22W x 34D x 28H in.)
Net Weight: 221 kg (487 lbs)
Equipment Clearance: Right, Left, Front – 569 mm (22 in.), Back – 254 mm (10 in.)
Chamber
Maximum Volume: 50.4 liters (3076 in³)
Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power
Number of Electrode Positions: 7
Electrode Pitch: 25.4 mm (1 in.)
Electrodes
Powered Working Area: 330W x 330D mm (13W x 13D in.)
Ground/Perforated Working Area: 368W x 330D mm (14.5W x 13D in.)
Floating Working Area: 330W x 330D mm (13W x 13D in.)
RF
Power Standard Wattage: 600 W
Frequency: 13.56 MHz
Gas Control
Available Flow Volumes: 10, 25, 50, 100, 250 or 500 sccm
Maximum Number of MFCs: 3
Control System and Interface
Software Control: EPC control with touchscreen interface
Remote Interface: PlasmaLINK, ProcessLINK
Vacuum Pump Standard Wet Pump: 19.5 cfm with Oxygen Oil Mist Eliminator
Optional Purged Dry Pump: 22 cfm
N2 Purged Pump Flow: 2 slm
