Nordson FlexTRAK-CD 等离子体处理系统 (5.5 liters)

Enclosure Dimensions: W x D x H – Footprint: 1068W x 1166D x 1600H; 1966H mm with light Tower (42W x 46D x 63H; 77H in. with Light Tower)

Net Weight: 430 kg (948 lbs.)

Equipment Clearance Right, Left, Back – 254 mm (10 in.), Front – 940 mm (37 in.)

Chamber Maximum Volume: 5.5 liters (338 in³)

Electrodes: 

Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power

Working Area: 305W x 305D mm (12W x 12D in.)

RF Power:

Standard Wattage: 600 W

Frequency: 13.56 MHz

Gas Control: 

Available Flow Volumes: 50, 100, or 250 sccm

Maximum Number of MFCs: 3

Control System and Interface

Software Control: EPC with PC-based touchscreen interface

Remote Interface: SMEMA, SECS/GEM

Vacuum Pump: Standard Purged Dry Pump: 16 cfm

N2 Purged Pump Flow: 2 slm

Brochure