Enclosure Dimensions: W x D x H – Footprint: 382W x 1210D x 1595H mm; 2037H mm with Light Tower 15W x 47.6D x 62.8H in. (80.2H in. with light tower)
Net Weight: 275 kg (605 lbs.)
Equipment Clearance: Right, Left – 153 mm (6 in), Front, Back – 914 mm (36 in)
Chamber Maximum Volume: 5.5 liters (338 in³)
Electrodes:
Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power
Working Area: 305W x 305D mm (12W x 12D in.)
RF Power:
Standard Wattage: 600 W
Frequency: 13.56 MHz
Gas Control:
Available Flow Volumes: 50, 100, or 250 sccm
Maximum Number of MFCs: 3
Control System and Interface
Software Control: EPC with PC-based touchscreen interface
Remote Interface: SMEMA, SECS/GEM
Vacuum Pump: Standard Purged Dry Pump: 16 cfm
N2 Purged Pump Flow: 2 slm
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