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Enclosure Dimensions
W x D x H – Footprint:
2314 W x 1935 D x 1787 H mm (2293 H mm with light tower)
91.1 W x 76.2 D x 70.5 H in (90.3 H in with light tower)
Net Weight: 1305 kg (2,871 lbs)
Effective Footprint –Clearances: All sides – 700 mm (27.6 in)
Chamber: Volume: F3-S chamber: 9.6 liters (585 in³)
F3 chamber: 5.5 liters (338 in³)
Electrodes: Powered Electrode Dimensions:
F3-S chamber: 305 W x 610 D mm / 12 W x 24 D in
F3 chamber: 305 W x 305 D mm / 12 W x 12 D in
RF Power:
Standard Wattage: F3-S chamber: 1000 W
Frequency: 13.56 MHz
Gas Control: Maximum Number of MFCs: 3
Control System: Interface: EPC with PC-based touchscreen interface
Remote Interface: Communications: SECS/GEM, Remote HMI
Vacuum Pump:
Standard Purged Dry Pump: 16 CFM, Variable Frequency Drive
N2 Purged Pump Flow: 2 SLM
