Nordson FlexTRAK-SHS 等离子体处理系统 (9.6 liters)

Enclosure Dimensions 

W x D x H – Footprint: 

2314 W x 1935 D x 1787 H mm (2293 H mm with light tower)

91.1 W x 76.2 D x 70.5 H in (90.3 H in with light tower)

Net Weight: 1305 kg (2,871 lbs)

Effective Footprint –Clearances: All sides – 700 mm (27.6 in)

Chamber: Volume: F3-S chamber: 9.6 liters (585 in³)

F3 chamber: 5.5 liters (338 in³)

Electrodes: Powered Electrode Dimensions: 

F3-S chamber: 305 W x 610 D mm / 12 W x 24 D in

F3 chamber: 305 W x 305 D mm / 12 W x 12 D in

RF Power:

Standard Wattage: F3-S chamber: 1000 W

Frequency: 13.56 MHz

Gas Control: Maximum Number of MFCs: 3

Control System: Interface: EPC with PC-based touchscreen interface

Remote Interface: Communications: SECS/GEM, Remote HMI

Vacuum Pump: 

Standard Purged Dry Pump: 16 CFM, Variable Frequency Drive

N2 Purged Pump Flow: 2 SLM

Brochure