Nordson StratoSPHERE 等离子体处理系统 (5.5 liters)

Enclosure Dimensions: W x D x H – Footprint: 1405W x 2615D x 1742H mm (55W x 103D x 69H in)

Net Weight: 480 kg (1058 lbs)

Process Module EFEM: 640 kg (1411 lbs)

Effective Footprint –Clearances: Front – 153 mm (6 in), Back – 380 mm (15 in), Left/Right – 775 mm (30.5 in)

Chamber: Maximum Volume:  5.5 liters (338 in³)

Chuck Configurations: 200 mm and 300 mm substrate sizes

Electrodes: 

Variable Electrode Configurations: Power-Ground, Ground-Power, Power-Power

Working Area: 305W x 305D mm (12W x 12D in.)

RF Power:

Standard Wattage: 600 W

Frequency: 13.56 MHz

Gas Control: 

Available Flow Volumes: 50, 100, or 250 sccm

Maximum Number of MFCs: 3

Control System and Interface

Software Control: EPC with PC-based touchscreen interface

Remote Interface: SMEMA, SECS/GEM

Vacuum Pump: Standard Purged Dry Pump: 16 cfm

Optional Purged Dry Pump: 16 cfm

N2 Purged Pump Flow: 2 slm

Brochure