OAI 200 桌面遮罩对齐器

Substrate Stage: X, Y Travel: ±10mm

                           Z Travel: 1.500 microns

                           Micrometer: .001"; .0001"

                           Graduations: or .01mm; .001mm

                           Rotation: ±3.5˚

Mask: Size: Up to 9" x 9"

Lightsource: Beam Size: Up to 8" square

                     Lamp Power: 200, 350, 500, 1.000, and 2.000 Watt NUV 500, 1.000 and 2.000 Watt DUV

Shutter Timer: Timer: 0.1 to 99.0 sec. at 0.1 second increments or 1 to 999 sec. at 1 second increments

Facilities: Electrical: 110 or 220VAC (or other according to Power Supply requirements and Country

                Vacuum 20 - 28” Hg.

                Air and N2 CDA at 60 PSI and N2at 40 PSI

                Exhaust 35” to 5” Water

Weight: 250Lbs

Dimensions (H x W x D): 37 x 31 x 25" (940 x 788 x 635mm)

Datasheet