Substrate Size: Up to 12” square or 300mm
Substrate:
Stage X, Y Travel: ±10mm
Z Travel: 5mm
Micrometer: .001”; .0001”
Graduations: or .01mm; .001mm
Rotation: ±3.5˚
Mask: Size: Up to 14” x 14”
Lightsource:
Beam Size: Up to 12” square
Lamp Power: 200, 350, 500, 1.000, and 2.000 Watt NUV 500, 1.000 and 2.000 Watt DUV
Shutter Timer: Timer: 0.1 to 99.0 sec. at 0.1 second increments or 1.0 to 999 sec. at 1.0 second increments
Facilities:
Electrical: 110 or 220 vac (or other according to Power Supply requirements and Country)
Vacuum: 20 - 28” Hg.
Air and N2: CDA at 60 PSI and N2at 20 PSI
Exhaust: 0.35” to 0.5” Water
Dimensions:
Height: 42” (1067mm)
Width: 60” (1524mm)
Depth: 53” (1346mm)
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