Applications:
+ DI water monitoring
+ Chemical distribution monitoring
+ Chemical quality assurance
+ Immersion lithography
Size channels 40, 70, 100, 125 nm
Flow rate 5 ml/min
Sample volume 2 ml/min nominal
Maximum concentration 2,500 particles/ml, Monitor and Spectrometer mode; 15,000 particles /ml, High-Scatter mode
Sample temperature 50 – 302 °F (10 – 150 °C)
Zero count < 20 counts/l
Laser source Laser diode
Dimensions (d, w, h) 17.5 x 18.75 x 11.75 in (68.9 x 47.6 x 29.8 cm)
Weight 35 lb (16 kg)
Power 100 – 240 VAC 1.25 Amp
Communications Ethernet, RS-232
Environment Temperature: 50 – 95 °F (10 – 35 °C); Humidity: Non-condensing
Electronic Flow controller
+ Range 2 – 20 ml/min
+ Accuracy + 10%
+ Control 0 – 10 VDC (supplied by sensor)
+ Fluid temperature 50 – 176 °F (10 – 80 °C)
+ Fluid pressure 70 psi, maximum
+ Wetted materials PFA/PTFE
+ Communications RS-232 (maintenance functions only)
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