Travel: 20 µm
Length: 2.24" (57 mm)
Resolution: 20 nm
Capacitance: 3.6 µF
Included Cable: SMC Female, 3 m
Recommended Controllers: BPC301, MDT694B, MPZ601, KPZ101
Compatible Stages: LNR50 Series or OEM Applications
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Travel: 20 µm
Length: 2.24" (57 mm)
Resolution: 20 nm
Capacitance: 3.6 µF
Included Cable: SMC Female, 3 m
Recommended Controllers: BPC301, MDT694B, MPZ601, KPZ101
Compatible Stages: LNR50 Series or OEM Applications
直接联系认证专家