THORLABS PAZ005 带反馈的压电致动器 (20 µm Travel)

Travel: 20 µm

Length: 2.24" (57 mm)

Resolution(a): 5 nm

Capacitance: 3.6 µF

Feedback: Strain Gauge

Accuracy: +1%/-0%

Repeatablity: 0.7 µm

Included Cables:

- SMC Female to SMC Female, 3 m

- 9-pin D-Sub Male to 7-pin LEMO Female, 3 m

Recommended Controllers: BPC301, MPZ601, KPZ101/KSG101

Compatible Stages: OEM Applications

(a) Dependent on control electronics.