TOB TOB-DSP-1200℃-PECVDS 旋转式真空管炉 (1200℃,0.1-10 5Pa)

Power: 3.5  KW

Furnace tube size(mm): Dia 60(OD) X1200mm

Dimension: 1300X420X1200

Power supply voltage: 220V

Phase number: Single-phase

Temperature control mode

1.Yudian temperature control: 30 sections can only use PID temperature regulation.

2.FP93 temperature control (from Japan)

Trigger: Phase-shift trigger

SCR: 106 / 16E Germany Simon Kang

Max temperature: 1200 ° C

Rated temperature: 1100 ℃

Heating rate: ≤30 ℃/ Min (Available upon request modification)

Control accuracy: +/- 1 ℃

Recommended heating rate: ≤15℃/ Min

Heating length: 400mm

Thermocouple Type: K type

Certification: CE

Surrounding surface temperature: ≤45℃

Turn the motor power: 40W

Electric putter power: 40W

Furnace can be tilted angle: -10 ~30 degrees

Tube rotation rate: Continuously variable motor speed can be adjustable in 1-25 rev / min

Plasma RF Power

Power output range: 0-500W

Maximum reflected power: 10W

Signal frequency: 13.56MHZ ± 0.005%

Noise: <30 dB

Air cooling: cooling method

Input Power: 208-240V 50 / 60HZ

GX supply system main parameters

Standard range: Proton flow controller 5,10,20,30,50,100,200,300,500SCCM,

1,2,3,5,10SLM 

(you can choose any scale)

Accuracy: ± 1.5%

Pressure drop: <0.01MPa

Repeatability: ± 0.2% F.S

Max Operating pressure: 3MP

VS-0.1 exhaust system

Power supply: 220V / 380V 380W

Pumping rate: 2L / S

Resistance vacuum gauge: ZDR-I

Vacuum measurement range: 0.1-10 5 Pa

Vacuum pump: VRD-8

Corrugated pipe: KF25X1000mm

Vacuum system: 10 -1Pa

Datasheet