TOB TOB-XY-SC 电容器操作台 (0~-0.1MPa, N,Ag,He)

H2O、  O2: ≤lppm

The leak rate: ≤0.05Vol% h (monthly leakage of oxygen <1L)

Foreline vacuum degree: 0 ~ -0.1MPa (2.5-stage vacuum table)

Case vacuum degree: 0 ~ -0.1MPa (2.5-stage vacuum table)

Transfer chamber can withstand: vacuum degree ≥100Pa

Working gas: nitrogen, argon, helium (purity 99.5%)

Datasheet