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Dimension(mm): 1150*1000*1800
Measure range: 500*400*200
Weight: 400
XY accuracy(um): 3+L/200
Repeatability(um): 3
CCD: 3.2M Pixel Digital Color CCD
Optical Lens: Manual lens 0.7-4.5X(6.5:1)
Surface light: Program control 8 segment LED cold light
Bottom light: LED parallel light
Focus distance: 90mm
Linear scale: 0.5um
Operate mocel: XYZ manual control